Measuring hydrogen-carbon gas inside high-vacuum glass panels by the comparative infrared light method
Journal
Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Journal Volume
25
Journal Issue
2
Pages
611-614
Date Issued
2007
Author(s)
Abstract
In this article, the authors propose a comparative infrared light method for detecting the hydrogen-carbon (HC) gas inside sealed high-vacuum glass panels. Unlike traditional infrared detection, a comparative infrared light method can distinguish gas species at a relatively short distance, which makes it suitable for carbon-nanotube field-emission display applications. In principle, the comparative infrared light method makes use of a high-vacuum reference panel to determine the existence of the target gas inside a sample panel under test. The authors experimentally demonstrated that residual organic gas (HC related) existed in a 5mm gap between two glass panels at the vacuum level of 10−6torr by this method.
Type
journal article