Development of a laser-based high-precision six-degrees-of-freedom motion errors measuring system for linear stage
Journal
Review of Scientific Instruments
Journal Volume
76
Journal Issue
5
Date Issued
2005
Author(s)
Abstract
This article presents a useful measuring system for the simultaneous measurement of six-degrees-of-freedom motion errors of a moving stage. The system integrates a miniature fiber coupled laser interferometer with specially designed optical paths and quadrant detectors, capable of measuring six-degrees-of-freedom motion errors. Using this model, the proposed measuring method provides rapid performance, simplicity of setup, and preprocess verification of a linear stage. The experimental setups and measuring procedures, and a systematic calculated method for the error verification are presented in the paper. The system's resolution of measuring straightness error component is about 25 nm. The resolution of measuring the pitch and yaw angular error component is about 0.06 arcs. With the comparison between the HP calibration system and the proposed system in the measuring range of 120 mm, the system accuracy of measuring straightness error and angular error is within the range ±0.6 μm and ±0.3 arcs. ? 2005 American Institute of Physics.
Subjects
Micromachining processing
Motion errors
Multiple lasers
Rotational errors
Degrees of freedom (mechanics)
Doppler effect
Interferometers
Laser applications
Laser beams
Micromachining
Printed circuit boards
Error analysis
SDGs
Type
journal article