A Flexible Tactile Sensing Array Based on Novel Capacitance Mechanism
Date Issued
2009
Date
2009
Author(s)
Huang, Xin-Hua
Abstract
In this work, we present the development of a reliable capacitive tactile sensing array by using simple fabrication processes. The sensing array, which consists of a micromachined polydimethlysiloxane (PDMS) structure and a flexible printed circuit board (FPCB), will be used as the artificial skin for robot applications. Each capacitive sensing element comprises two sensing electrodes and a common floating electrode. The sensing electrodes as well as the metal interconnect for signal scanning are implemented on the FPCB, while the floating electrode is patterned on the PDMS structure. This special design can effectively reduce the complexity of device structure and thus makes the device highly reliable and manufacturable. The characteristics of the devices with 4.5?4.5 mm2, 3?3 mm2 and 1.5?1.5 mm2 sensing elements are measured and discussed. The measured sensitivities for these three devices are 0.55%/kPa, 0.15%/kPa and 0.03%/kPa, respectively. The scanning circuit for capacitive sensing array are also designed and implemented. The tactile images induced by the PMMA stamps of different shapes are successfully captured by using a fabricated 8x8 array.
Subjects
Capacitive tactile sensing array
MEMS
SU-8
PDMS
Type
thesis
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