Composition Control of R.F.-Sputtered Ni2MnGa Thin Films Using Optical Emission Spectroscopy
Resource
Materials Transaction, JIM 43: 871-875
Journal
Materials Transaction, JIM 43: 871-875
Pages
-
Date Issued
2002
Date
2002
Author(s)
Wu, S.K.
Tseng, K.H.
Type
journal article