Application of Reutilization Technology to Calcium Fluoride Sludge from Semiconductor Manufacturers

Resource

JOURNAL OF THE AIR & WASTE MANAGEMENT ASSOCIATION, 61(1), 85-91

Journal

Journal of the Air & Waste Management Association

Pages

85-91

Date Issued

2011

Date

2011

Author(s)

Liu, Wei-Ting

Li, Kung-Cheh

DOI

URI

Type

journal article

File(s)

Name

74.pdf

Size

23.43 KB

Format

Adobe PDF

Checksum

(MD5):6f7da7e690305039f01fd94df25cbee8