GaAs surface passivation using in-situ oxide deposition

Journal

Applied Surface Science

Journal Volume

104

Pages

441-447

Date Issued

1996

Author(s)

Passlack, M

Opila, RL

Mannaerts, JP

Kwo, JR

DOI

10.1016/S0169-4332(96)00184-5

URI

http://scholars.lib.ntu.edu.tw/handle/123456789/323225

Type

journal article