A Piezoelectric MEMS True Random Number Generator Driven by Amplitude-Modulated Internal Resonance
Part Of
Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
Start Page
144
End Page
147
ISSN
10846999
ISBN (of the container)
9798331572518
ISBN
9798331572518
Date Issued
2026
Author(s)
Abstract
This work demonstrates a true random number generator (TRNG) in a 1:2 internal resonant (IR) ScAIN piezoelectric resonator driven by an amplitude-modulated (AM) signal. While IR alone establishes a dynamic twowell potential with two localized energy states, the addition of AM pumping facilitates the system to transition between these states and the resonator's trivial low-energy state. The synergy between IR and AM engineers a dynamic multi-well potential landscape, where the complex evolution between energy potentials results in chaotic vibrations ideal for generating unpredictable bitstreams. By introducing a pseudo XOR operation to the chaotic vibration and selecting the 3 least significant bits (LSBs), this approach achieves a 450-kbps throughput at a 150 kHz sampling rate and validates a high-quality entropy. In particular, a 1.125-Mbit bitstream generated in 2.5 seconds successfully passes NIST 800-22 and NIST 800-90B IID (independent and identically distributed) tests and shows a non-IID min-entropy of 0.878368, confirming the AMdriven IR resonator as a robust entropy source for cryptographic applications.
Event(s)
39th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2026, 25 January 2026 - 29 January 2026, Salzburg
Subjects
amplitude modulation
internal resonance
piezoelectric resonator
ScAlN
TRNG
True random number generator
Publisher
Institute of Electrical and Electronics Engineers Inc.
Type
conference paper