Development of a Precision Hybrid Scanner for Large Measurement-Range Atomic Force Microscopy
Date Issued
2012
Date
2012
Author(s)
Huang, Kuan-Chia
Abstract
Atomic force microscopy (AFM) is a powerful technique to provide high resolution, three-dimensional data for measuring topography of samples. However, the scanning range of conventional AFM systems hardly exceeds hundreds of micrometers because of the short traveling range of piezoelectric actuation. In this research, we develop a large measurement-range AFM system with a z-scanner separated from the precision hybrid xy-scanner. The z-scanner provides high speed scanning and the hybrid xy-scanner is capable of 2 mm × 2 mm large field positioning with 15 nm resolution.
The overall hybrid scanner consists of a commercial piezoelectric scanner, four sets of electromagnetic actuator, a monolithic parallel compliant mechanism, and an eddy current damper. Furthermore, we design cascaded-type control strategy and two MIMO controllers - adaptive complementary sliding mode and neural network complementary sliding mode controller to deal with the unknown parameters, the cross-talk effects, the external disturbances and unknown hysteresis phenomena. Finally, several experimental results and application demonstrate the scanning capability of the proposed system.
Subjects
Precision hybrid scanner
Parallel compliant mechanism
Cascaded-type control strategy
Adaptive complementary sliding mode controller
Neural network complementary sliding mode controller
Type
thesis
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