Doping concentration and surface morphology of 4H-SiC C-face epitaxial growth

Journal

Materials Science Forum

Journal Volume

645-648

Pages

123-126

Date Issued

2010

Author(s)

Lee, K.-Y.

Lee, S.-Y.

DOI

10.4028/www.scientific.net/MSF.645-648.123

URI

https://scholars.lib.ntu.edu.tw/handle/123456789/451528

URL

https://www.scopus.com/inward/record.uri?eid=2-s2.0-77955460033&doi=10.4028%2fwww.scientific.net%2fMSF.645-648.123&partnerID=40&md5=8d44f00f6199db5d5a0a96a78d983a80

Type

conference paper