High-Fidelity TiN Processing Modes for Multigate Ge-Based Quantum Devices
Journal
ACS Applied Electronic Materials
Journal Volume
7
Journal Issue
2
Start Page
652
End Page
659
ISSN
2637-6113
2637-6113
Date Issued
2025-01-10
Author(s)
Sinan Bugu
Sheshank Biradar
Alan Blake
CheeWee Liu
Maksym Myronov
Ray Duffy
Giorgos Fagas
Nikolay Petkov
SDGs
Publisher
American Chemical Society (ACS)
Type
journal article