Pressurized shape-memory micropumps
Journal
Proceedings of SPIE - The International Society for Optical Engineering
Journal Volume
4699
Pages
263-272
Date Issued
2002
Author(s)
Abstract
We propose a multiscale framework to study the behavior of pressurized shape-memory thin films. These alloy films are typically heterogeneous and contain three length scales including film thickness, grain size and microstructure scale. We show that the effective behavior of shape-memory film exhibits strong size effect due to the interaction among these dimensional and material length scales. In addition, we apply the thin-film theory to predict maximum recoverable deflection for various shape-memory diaphragms with different textures. We find that recoverable deflection is not sensitive to common film textures in Ti-Ni films while it is sensitive in Cu-based shape-memory films. It turns out that Cu-based films may have better behavior than sputtered Ti-Ni films in view of large recoverable deflection. We conclude with comparison with experiment.
Type
conference paper