A novel illuminator design in a rapid thermal processor

Resource

IEEE Transactions on Semiconductor Manufacturing 14 (2): 152-156

Journal

IEEE Transactions on Semiconductor Manufacturing

Journal Volume

14

Journal Issue

2

Pages

152-156

Date Issued

2001

Author(s)

Lee, M.H.

DOI

URI

Type

journal article

File(s)

Name

20.pdf

Size

91.29 KB

Format

Adobe PDF

Checksum

(MD5):8c4843ae817201c7f82f339f6a09229b