Analysis of microscopic crystallization of two-shot SLS process and its dependence on performance of LTPS devices

Journal

Digest of Technical Papers - SID International Symposium

Journal Volume

37

Journal Issue

1

Pages

212-215

Date Issued

2006

Author(s)

Shih, C.-J.

Yeh, W.-C.

Fang, C.-H.

Lan, C.-W.

DOI

10.1889/1.2433456

URI

https://scholars.lib.ntu.edu.tw/handle/123456789/444922

URL

https://www.scopus.com/inward/record.uri?eid=2-s2.0-34547590655&doi=10.1889%2f1.2433456&partnerID=40&md5=6605c076221f7a3a054238e6f16fac79

Type

conference paper