Manufacturability analysis of a MEMS-based electron-optical system design for direct-write lithography

Journal

International Microprocesses and Nanotechnology Conference 2009

Pages

174-175

Date Issued

2009-11

Author(s)

Sheng-Yung Chen

Shin-Chuan Chen

Hsing-Hong Chen

Ting-Han Pei

Kuen-Yu Tsai

Hsin-Hung Pan

URI

Type

conference paper