Synthesis and characterization of tris(beta-ketoiminato)ruthenium(III) complexes: Potential precursors for CVD of Ru and RuO2 thin films
Resource
CHEMICAL VAPOR DEPOSITION,10(3),149-158.
Journal
CHEMICAL VAPOR DEPOSITION
Journal Volume
10
Journal Issue
3
Pages
149-158
Date Issued
2004
Date
2004
Author(s)
Chou, TY
Lai, YH
Chen, YL
Chi, Y
Prasad, KR
Carty, AJ
Peng, SM
Lee, GH
Type
journal article