A Wireless Cardiovascular Pressure Sensor Based on an Iontronic Film with High Sensitivity
Journal
Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
Journal Volume
2021-January
Pages
135-138
Date Issued
2021
Author(s)
Abstract
This work presents an ultra-sensitive iontronic wireless pressure sensor. The device consists of an inductor coil and a parallel-plate capacitor for pressure sensing. A microstructured iontronic film, which was embedded on the capacitor as dielectric layer, was the key element for enhancing the device performance. Assisted by the ultrahigh capacitance of electron double layers forming at the iontronic film/electrode interface, the sensitivity of the proposed device can be remarkably increased. Externally applied pressure on the device changes the capacitance, and then induces a shift in resonant frequency, which can be wirelessly retrieved by using the phase-dip technique. The measured pressure sensitivity of the proposed device was 0.014 mmHg, which is about 50 times larger than that of the device without iontronic film. ? 2021 IEEE.
Subjects
Electron Double Layer
Iontronic Film
LC resonator
Phase-dip Technique
Wireless Pressure Sensor
Capacitance
Mechanics
Natural frequencies
Pressure sensors
Applied pressure
Device performance
High sensitivity
Parallel plate capacitors
Pressure sensing
Pressure sensitivities
Ultra sensitives
Wireless pressure sensors
MEMS
SDGs
Type
conference paper