Efficient and waiting time violation-free furnace tool allocation via integration of sequencing constraints
Journal
2012 e-Manufacturing and Design Collaboration Symposium
Date Issued
2012
Author(s)
Abstract
Furnace tool group is very often a bottleneck in semiconductor fabrication. Furnace tools are characterized by long processing times with batching requirements, stringent limitations on times to wait for furnace processing and heterogeneous configurations of individual tools. Effective furnace tool scheduling is very important to improve productivity and reduce production cycle time, but is quite challenging to fab operation management because of its complexity.
Type
conference paper