CMP廢水電混凝中鐵離子效應之研究
The Effect of Fe ion on Electrocoagulation for CMP Wastewater Treatment
Date Issued
2007
Date
2007
Author(s)
Cheng, Sheng-Wei
DOI
zh-TW
Abstract
This thesis on removing nano-particles from CMP wastewater by electrocoagulation process has mainly studied in five parts. The relationship between surface properties analyzing of nano-particles and the theory of coagulation was investigated in first part study. Efficiency of electrocoagulaion in different types of CMP was studied in second part. The mathematic model was built in third part. The parameters of the model in electrocoagulation process was investigated in the forth part. The behavior of particles in EC process and the parameters of model was investigated by DLVO theory in the fifth part.
According to the experiment results of the two slurries, it was found that the zetapotential had changed by the pH value because of the strength of ion in solution. And it would lead to both the properties of surface and the repulsive energy between particles changed by electropressed. The efficiency of the particle abatement by EC treatment on two kinds of CMP slurry was perfect. As the operation current of EC treatment on oxide CMP slurry was 1A, the particles had almost been removed after 9~10 minutes EC time. The same result would be achieved in the same EC time by 0.45A operation current of mental CMP slurry treatment.
According to the establishing of the model, the change of particle’s concentration along with EC time could be predict. And the lowest limited EC time could be found. It also mean that the concentration of Fe3+ were achieved c.c.c ( Critical Coagulation Concentration), then the mechanism of coagulaion would be started. And c.c.c of metal slurry was 10.69mg/L, and oxide slurry was 26.83mg/L. The theoretical c.c.c also could be found by DLVO theory. The value was closed to modeling one. So it could expect that the model could be applied to other slurry or wastewater treatment.
Subjects
電混凝
化學機械研磨廢液
混凝理論
廢水處理
鐵離子
electrocoagulation
CMP wastewater
DLVO
Fe ion
wastewater treatment
Type
thesis
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