Low-Order Models for Fast Dynamical Simulation of MEMS Microstructures

Journal

Transducers' 1997

Pages

1101-1104

Date Issued

1997

Author(s)

E. Hung

Y.-J. Yang

S. Senturia

URI

https://scholars.lib.ntu.edu.tw/handle/123456789/587811

https://www.scopus.com/inward/record.uri?eid=2-s2.0-0030654981&partnerID=40&md5=b67b836dc113ede4a3c894c433eb733a

Description

Chicago

Type

conference paper