Ti-containing hydrogenated carbon films fabricated by high-power plasma magnetron sputtering

Resource

Transactions of Nonferrous Metals Society of China, 22(6), 1381-1386

Journal

Transactions of Nonferrous Metals Society of China

Pages

1381-1386

Date Issued

2012

Date

2012

Author(s)

Yang, Peng

Fuh, Yiin-kuen

Chu, Chun-Lin

Lo, Chih-Hung

DOI

URI

Type

journal article

File(s)

Name

10.pdf

Size

23.44 KB

Format

Adobe PDF

Checksum

(MD5):6c3d045a91e2e058ba195522243c1ffc