Structural and optical properties of amorphous silicon oxynitride

Journal

Journal of Applied Physics

Journal Volume

79

Journal Issue

2

Pages

656-663

Date Issued

1996

Author(s)

Yeh, J.-L.

DOI

10.1063/1.360809

URI

https://scholars.lib.ntu.edu.tw/handle/123456789/498804

URL

https://www.scopus.com/inward/record.uri?eid=2-s2.0-0029733914&doi=10.1063%2f1.360809&partnerID=40&md5=08c0a2e5f10b372d16982fe710377625

Type

journal article