Integrated yield-mining solution with enhanced electrical test data correlation
Resource
Semiconductor Manufacturing, 2003 IEEE International Symposium on
Journal
The Ninth International Symposium on Semiconductor Manufacturing, 2003
Date Issued
2003-10
Date
2003-10
Author(s)
DOI
1523-553X
Abstract
between CP yield data and electrical test (Er) data so that the engineers can diagnose and improve yield i) explain the confounded correlation between yield and more effectively.Also, an interactive yield-mining system is ET, developed to embed engineers, in the data ii) propose an integrated yield-mining framework with enhanced ET correlation, mining process.To cope with the single-tool problem and the small sample size feature in a yield o1 in a iii) design an interactive yield-mining system with engineering knowledge embedded, and high product-mix, low volume production environment, a project-based multi-product analysis methodology is iv) validate the proposed solutions using a multi-product analysis example.develoved to enhance the diaanosis cavabilitv.The I proposed solutions have been fine tuned and validated in a local foundT fah.CONFOUNDED CORRELATION
Type
journal article
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