Development of an optical pickup system for measuring the displacement of the micro cantilever in scanning probe microscope
Resource
Mechatronics, 2005. ICM '05. IEEE International Conference on
Journal
IEEE International Conference on Mechatronics, 2005
Pages
-
Date Issued
2005-07
Date
2005-07
Author(s)
DOI
N/A
Abstract
This paper presents the development and the verification of a compact optical sensor system for measuring the displacement of the micro cantilever in scanning probe microscope (SPM). An optical pickup head of commercial compact disc (CD)/digital versatile disc (DVD) read only memory (ROM) drive is applied in this displacement sensor system. For fulfilling our tight measuring requirements of sensibility and reliability, the build-in detection device is replaced with a four-quadrant photodiode. The developed system is well functionally verified by measuring calibration sample of 463 nm (pitch) times 30 nm (height).
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Type
journal article
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