Development of an optical pickup system for measuring the displacement of the micro cantilever in scanning probe microscope

Resource

Mechatronics, 2005. ICM '05. IEEE International Conference on

Journal

IEEE International Conference on Mechatronics, 2005

Pages

-

Date Issued

2005-07

Date

2005-07

Author(s)

Hwu, En-Te

Chow, Hsin-Yi

DOI

DOI

N/A

URI

Type

journal article

File(s)

Name

01529345.pdf

Size

307.52 KB

Format

Adobe PDF

Checksum

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