Research on Micro Coordinate Measuring Machine Under High Accuracy Constant Temperature Chamber

This thesis mainly researches on Micro-CMM, including the stability of laser diode interferometer and the development of a constant temperature chamber. Micro-CMM adopts laser diode Michelson interferometers as displacement sensors. Laser wavelength is the decisive parameter of its accuracy. Therefore, an integrated wavelength compensator mathematics model and hardware were fully developed. Environment stabilization is essential for any precision instruments. Conventional clean room costs too high and consumes much energy; commercial constant temperature chamber is too bulky in size and involves much vibration. A portable constant temperature chamber was developed in this thesis. Cheap TEC coolers are installed on the top of the chamber and cool the environment by natural convection, which contains no vibration. Temperature stability can achieve 20.010±0.014℃(k=2), which is better than ISO standard for Class I metrology room. Under constant temperature environment, accuracy and stabilization of laser wavelength can achieve an order of 10-6. Furthermore, there are some Micro-CMM measurements, including probe trigger and scanning. Several practices are shown in this thesis.