Deposition of osmium thin films using pyrazolate complexes as CVD source reagents

Journal

Journal of Materials Chemistry

Journal Volume

12

Journal Issue

5

Pages

1363-1369

Date Issued

2002

Author(s)

Chi, Y.

Yu, H.-L.

Ching, W.-L.

Liu, C.-S.

Chen, Y.-L.

Chou, T.-Y.

Lee, G.-H.

DOI

10.1039/b109150f

URI

http://www.scopus.com/inward/record.url?eid=2-s2.0-0036096259&partnerID=MN8TOARS

http://scholars.lib.ntu.edu.tw/handle/123456789/297464

Type

journal article