Influence of surface roughness and interfacial layer on the infrared spectra of V-CVD grown 3C-SiC/Si (100) epilayers

Journal

Semiconductor Science and Technology

Journal Volume

27

Journal Issue

11

Date Issued

2012

Author(s)

Talwar, D.N.

Feng, Z.C.

Liu, C.W.

Tin, C.-C.

DOI

10.1088/0268-1242/27/11/115019

URI

http://www.scopus.com/inward/record.url?eid=2-s2.0-84868021839&partnerID=MN8TOARS

http://scholars.lib.ntu.edu.tw/handle/123456789/372784

Type

journal article