Quality factor enhancement in micromechanical resonators at cryogenic temperatures

Journal

TRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems

Pages

1445-1448

Date Issued

2009

Author(s)

Li, W.-C.

Lin, Y.

Kim, B.

Ren, Z.

Nguyen, C.T.-C.

DOI

URI

URL

Type

conference paper