Fabrication of Blue-Laser Benzocyclobutene Optical Waveguide by UV Illumination
Date Issued
2006
Date
2006
Author(s)
Chen, Kuan-Yu
DOI
zh-TW
Abstract
In this work, buried-type single-mode benzocyclobutene (BCB) channel waveguides fabricated by 248nm krypton fluorine (KrF) excimer laser for a blue laser of wavelength 473nm are first demonstrated. The ultraviolet-induced refractive index changes, measured by prism coupler and spectroscopic ellipsometer, are dependent on the number of laser shots and the pulse repetition rate. By arranging the number of laser shots and the mask width, mode sizes with different aspect ratios can be obtained. Moreover, the proposed UV illumination method is much simpler and more flexible than the conventional dry etching method.
Subjects
藍光
光波導
準分子雷射
Benzocyclobutene
BCB
Cyclotene
Optical Waveguide
Excimer Laser
KrF
Type
thesis
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