https://scholars.lib.ntu.edu.tw/handle/123456789/119908
標題: | High-performance ZnO thin-film transistors fabricated at low temperature on glass substrates | 作者: | Liu, C.C. Chen, Y.S. JIAN-JANG HUANG |
公開日期: | 七月-2006 | 摘要: | A high-performance enhancement-mode ZnO thin-film transistor (TFT) on a glass substrate is demonstrated. The ZnO thin film is deposited by RF magnetron sputtering with the presence of O2 at low deposition rate and low temperature. The IDS is as high as 1mA when biased at the saturation region VDS=10-20V and VGS=5V without any post-thermal anneal. The Ion/Ioff ratio is 3×106. The results are among the best ZnO TFTs ever obtained. |
URI: | https://www.scopus.com/inward/record.uri?eid=2-s2.0-33745785089&doi=10.1049%2fel%3a20061518&partnerID=40&md5=0a7e1d8c0f8f0ac937806de7b541e7a7 | 其他識別: | 0013-5194 | DOI: | 10.1049/el:20061518 |
顯示於: | 光電工程學研究所 |
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