Organic Deformable Mirror for Adaptive Optics
Date Issued
2007
Date
2007
Author(s)
Chen, Tyng-Yow
DOI
en-US
Abstract
Abstract
It is popular that scientist using deformable mirror in astronomy observation for a long time, and deformable mirror’s application in biomedical application, VOA, and optical image system is gradually developing in recent years. In the thesis, I discuss about the obstacles we met when designing or fabricating an optical deformable mirror. Besides, we present a new model of deformable mirroe, and it improved the accuracy problem when defining the shape of the mirror, and the package problem of the mirror.
Here we choose a low stress polymer material as the membrane structure. By MEMs technology, we produce the thin film with only 1 (um) thickness, and we define any desired shape on thin film by lithography. Owning to the progress of process, we can further lower down the residual stress and young’s modulus to 2.5 MPa and 10 GPa. By the excellent mechanical properties, we achieve almost 40 um deflection in less than 250 Volts applying voltage. Moreover, we use the reflective beam profiler for analyzing the reflected laser beam, we can measure the curvature of the mirror from this data. In the image quality purpose, we try to use the low-temperature process in the process flow. From this we can achieve surface roughness less than 1/20，visible light wavelength which is helpful for the optical image system.
We have successfully designed, fabricated and tested the deformable mirror, and from the excellent mechanical properties of the mirror, it is believed that the applications can be developed and widen, and have some assistance for human technology.
Subjects
可形變面鏡
微機電
有機材料
微型成像系統
可變焦面鏡
deformable mirror
MEMs
organic material
small-size optical image system
mirror with tunable curvature
Type
thesis
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