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  4. Multi-channel Surface Plasmon Resonance Silicon Waveguide Sensor System
 
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Multi-channel Surface Plasmon Resonance Silicon Waveguide Sensor System

Date Issued
2006
Date
2006
Author(s)
Lin, Hsueh-min
DOI
en-US
URI
http://ntur.lib.ntu.edu.tw//handle/246246/52950
Abstract
Biosensors using guided wave have been very popular in the past few years due to its high sensitivity and possible commercial opportunity. Surface plasmon resonance (SPR) as basic transduction method for chemical sensing is quite well-known. SPR sensors have the advantages of label-free and real-time detection. The waveguide configuration allowed SPR detection miniaturized, unlike traditional angle-modulated SPR detection which is limited in a standard lab-size room. The waveguide was manufactured by semiconductor technique which can be used for mass production. An SPR optical sensor system based on ridged-waveguides on a precise optical bench was designed and built in this thesis. Multi-channel design and specialized optical bench allowed the sensor to perform multiple sensing. The waveguide sensors fabricated by MEMS technology consisted of a 10μm SiO2 substrate layer (n= 1.469), 10μm Ge doped SiO2 channel guide (n= 1.492), both are produced by plasmon enhanced chemical vapor deposition (PECVD) and wet etching standard semiconductor manufacturing procedure. Optimal process parameters had been acquired during previous studies to understand the resultant refractive index and doping concentration and dimensional specifications . A 50 nm gold thin film, 500μm in length was placed on top of ridge waveguide and SPR signal detections using E-beam lithography process. The waveguide chip was 1cm x 1cm in dimension. A surface polishing was needed for an even distribution of light focusing into the waveguide. Obtaining data from SPR waveguide sensor required a precise measuring platform with various degrees of freedom. In this thesis, different platforms were built for different applications. End-firing method was built with two V objective lenses on precise six-degree moving stage to obtain single channel detection. Broadband light and spectrometer were used in this kind of detection for observing the change of surface plasmon wavelength peak. For multiple detection, two methods were been used. For focusing light source (633nm laser) into the waveguide, in this method, a cylindrical lens for focusing. Broadband light source (Tungsten light or miniaturized LED), a parallel bundle of fiber were used, again those fiber bundles were mounted onto precise six-degree moving stage. The light from SPR waveguide was collected by spectrometer. A polarizer was put in between the waveguide and light detector to ensure the TM polarized direction. Various concentrations of glycerol and glucose were tested on two different configurations: single channel configuration and multi-channel configuration. Transmission loss due to SPR spectrum in comparison to the aero environment is calculated from transmission spectrum obtained from spectrometer. A transmission loss spectrum of nano particles deposited on gold sensing layer was demonstrated using the multi-channel configuration.
Subjects
表面電漿共振
光波導
生物晶片
Surface plasmon resonance
Optical waveguide
Biochip
Type
thesis
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