Improved Performance of n-MOSFET's with Reoxidized Nitrided Oxide (RNO) by Using N20 as the Reoxidizer
Resource
Proceedings of Electronic Devices and Materials Symposium, p.234-237
Journal
Proceedings of Electronic Devices and Materials Symposium
Pages
234-237
Date Issued
1993
Date
1993
Author(s)
Type
conference paper