https://scholars.lib.ntu.edu.tw/handle/123456789/151287
標題: | Measuring the Deflection of the Cantilever in Atomic Force Microscope with an Optical Pickup System | 作者: | Lin, Meng-Hu Hung Shao-Kang Huang Sheng-Chih LI-CHEN FU |
公開日期: | 2006 | 起(迄)頁: | 592-596 | 來源出版物: | Proceedings of the IEEE Conference on Decision and Control | 會議論文: | 45th IEEE Conference on Decision and Control 2006, CDC | 摘要: | This paper is to present the development and the verification of a compact optical sensor system for measuring the deflection of the cantilever in a tapping-mode atomic force microscope (AFM). An optical pickup head of commercial digital versatile disc read only memory (DVD-ROM) drive is applied in this sensor system. In order to satisfy the strict measuring requirements of sensibility and reliability, the build-in detection system is replaced with a four-quadrant photodiode of traditional optical-lever technique. In addition, an inertial motor composed by a piezo-actuator is used as the sample approaching mechanism and the scanner in the vertical direction. Thus, the volume of hardware structure is decreased, and the sensing variance due to temperature change will be minimized. The developed AFM system is well functionally verified by measuring a calibration grating with step height 19.5 nm, and the vertical resolution is ±8 nm. © 2006 IEEE. |
URI: | http://ntur.lib.ntu.edu.tw//handle/246246/220772 https://www.scopus.com/inward/record.uri?eid=2-s2.0-39649124491&doi=10.1109%2fcdc.2006.377088&partnerID=40&md5=7b02debd432693a397f49cc949ee97a2 |
ISSN: | 07431546 | SDG/關鍵字: | Atomic force microscopy; Optical systems; Optimization; Pickups; Reliability theory; ROM; Videodisks; Digital versatile disc; Optical pickup system; Cantilever beams |
顯示於: | 電機工程學系 |
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