https://scholars.lib.ntu.edu.tw/handle/123456789/152628
Title: | 20 nm silicon nanorods fabricated by reactive ion etch | Authors: | Liang, Eih-Zhe Huang, Chao-Jei Lin, Ching-Fuh |
Issue Date: | Aug-2004 | Start page/Pages: | - | Source: | 4th IEEE Conference on Nanotechnology, 2004. | URI: | http://ntur.lib.ntu.edu.tw//handle/246246/200704191001678 | Other Identifiers: | N/A | DOI: | 10.1109/NANO.2004.1392393 |
Appears in Collections: | 電機工程學系 |
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01392393.pdf | 238.15 kB | Adobe PDF | View/Open |
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