https://scholars.lib.ntu.edu.tw/handle/123456789/154252
Title: | Microcrystalline Silicon Deposited by Glow Discharge Decomposition of Heavily-Diluted Silane | Authors: | Chou, J. S. Sah, Wen-Jyh Chang, T. C. Wang, J. C. 李嗣涔 Lee, Si-Chen |
Issue Date: | 1992 | Journal Volume: | v.32 | Start page/Pages: | 273-279 | Source: | Materials Chemistry and Physics | URI: | http://ntur.lib.ntu.edu.tw//handle/246246/120733 |
Appears in Collections: | 電機工程學系 |
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