https://scholars.lib.ntu.edu.tw/handle/123456789/155654
DC Field | Value | Language |
---|---|---|
dc.contributor.author | Liang, Eih-Zhe | en |
dc.contributor.author | Huang, Chao-Jei | en |
dc.contributor.author | Lin, Ching-Fuh | en |
dc.creator | Liang, Eih-Zhe; Huang, Chao-Jei; Lin, Ching-Fuh | - |
dc.date | 2006 | en |
dc.date.accessioned | 2009-03-18T06:41:43Z | - |
dc.date.accessioned | 2018-07-06T15:58:41Z | - |
dc.date.available | 2009-03-18T06:41:43Z | - |
dc.date.available | 2018-07-06T15:58:41Z | - |
dc.date.issued | 2006 | - |
dc.identifier.uri | http://ntur.lib.ntu.edu.tw//handle/246246/145964 | - |
dc.format | application/pdf | en |
dc.format.extent | 427561 bytes | - |
dc.format.mimetype | application/pdf | - |
dc.language | en | en |
dc.language.iso | en_US | - |
dc.relation | The Journal of Vacuum Science and Technology B 24 (2): 599-603 | en |
dc.relation | J. Vac. Sci. Technol. B,24(2),599-603. | en |
dc.relation.ispartof | The Journal of Vacuum Science and Technology B | - |
dc.title | Use of SiO2 nanoparticles as etch mask to generate Si nanorods by reactive ion etch | en |
dc.type | journal article | en |
dc.relation.pages | 599-603 | - |
dc.relation.journalvolume | Vacuum | - |
dc.relation.journalissue | 2 | - |
dc.identifier.uri.fulltext | http://ntur.lib.ntu.edu.tw/bitstream/246246/145964/1/77.pdf | - |
item.languageiso639-1 | en_US | - |
item.fulltext | with fulltext | - |
item.grantfulltext | open | - |
item.openairetype | journal article | - |
item.openairecristype | http://purl.org/coar/resource_type/c_6501 | - |
item.cerifentitytype | Publications | - |
crisitem.author.dept | Photonics and Optoelectronics | - |
crisitem.author.dept | Electrical Engineering | - |
crisitem.author.dept | Electronics Engineering | - |
crisitem.author.orcid | 0000-0003-3787-2163 | - |
crisitem.author.parentorg | College of Electrical Engineering and Computer Science | - |
crisitem.author.parentorg | College of Electrical Engineering and Computer Science | - |
crisitem.author.parentorg | College of Electrical Engineering and Computer Science | - |
Appears in Collections: | 電機工程學系 |
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