Characterization of reactively r.f.-sputtered tantalum oxide films

Resource

Thin Solid Films 162: 325-331

Journal

Thin Solid Films 162:

Pages

325-331

Date Issued

1988

Date

1988

Author(s)

Tu, Yuan-Kuang

Lin, Chia-Chien

Wang, Way-Seen

Huang, Sheng-Liang

URI

Type

journal article

File(s)

Name

02.pdf

Size

342.62 KB

Format

Adobe PDF

Checksum

(MD5):de689efb2eb7882f2fa11d861c89876b