https://scholars.lib.ntu.edu.tw/handle/123456789/155867| Title: | Fabrication of sub-quarter-micron grating patterns by employing DUV holographic lithography | Authors: | Wang, L. A. Lin, C. H. Chen, J. H. |
Issue Date: | 1999 | Journal Issue: | 46 | Start page/Pages: | 173-177 | Source: | Microelectronic Engineering | URI: | http://ntur.lib.ntu.edu.tw//handle/246246/148148 |
| Appears in Collections: | 電機工程學系 |
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