Fabrication of sub-quarter-micron grating patterns by employing DUV holographic lithography

Resource

Microelectronic Engineering 46 (1-4): 173-177

Journal

Microelectronic Engineering

Journal Issue

46

Pages

173-177

Date Issued

1999

Date

1999

Author(s)

Wang, L. A.

Lin, C. H.

Chen, J. H.

URI

Type

journal article

File(s)

Name

15.pdf

Size

790.32 KB

Format

Adobe PDF

Checksum

(MD5):3d70428ec7ea2b7e99ba6cd80d3ff779