https://scholars.lib.ntu.edu.tw/handle/123456789/155902| Title: | Fabrication and characterization of aluminum oxide/chromium oxide superlattice for attenuated phase-shifting mask working at 193 nm wavelength | Authors: | Lai, F. D. LON A. WANG |
Issue Date: | 2002 | Journal Volume: | 409 | Journal Issue: | 2 | Start page/Pages: | 220-226 | Source: | Thin Solid Films | URI: | http://ntur.lib.ntu.edu.tw//handle/246246/148185 https://www.scopus.com/inward/record.uri?eid=2-s2.0-0037197337&doi=10.1016%2fS0040-6090%2802%2900137-2&partnerID=40&md5=d642235f805d6e6e4e03eb510bf9904a |
ISSN: | 00406090 | DOI: | 10.1016/S0040-6090(02)00137-2 |
| Appears in Collections: | 電機工程學系 |
Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.