https://scholars.lib.ntu.edu.tw/handle/123456789/155966
Title: | Characterization of the Ultrathin HfO2 and Hf-Silicate Films Grown by Atomic Layer Deposition | Authors: | Chen, Tze Chiang Peng, Cheng-Yi Tseng, Chih-Hung Liao, Ming-Han Chen, Mei-Hsin Wu, Chih-I Chern, Ming-Yau Tzeng, Pei-Jer Liu, Chee Wee |
Issue Date: | 2007 | Journal Volume: | 54 | Journal Issue: | 4 | Start page/Pages: | 759-766 | Source: | IEEE Transactions on Electron Devices | URI: | http://ntur.lib.ntu.edu.tw//handle/246246/148250 http://ntur.lib.ntu.edu.tw/bitstream/246246/148250/1/79.pdf |
DOI: | 10.1109/TED.2007.892012 |
Appears in Collections: | 電機工程學系 |
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