PDIC 用光偵測器之量測、模擬與製程最佳化

In this project, we have developed
techniques for extracting the parameters for
modeling the photosensor in 650 nm PDIC
designed for DVD pick-up head. Our first
step was to set up a measurement system for
characterizing the responsivity of the detectors.
Then, we developed a set of program to
simulate the measured responsivity. The
program set has two portions, one using
transmission matrix method to estimate the
absorption of incident light in the photodetector,
the other solving the Poission and continuity
equations to calculate the distribution of the
photo-generated carriers and the collection
currents. The simulation fits the experimental
result quite well. Parameters including the
diffusion length, surface recombination and the
thickness of the dielectric layer and etc. are
extracted for the design of photodetector in
PDIC.