Fabrication and Reliability test of Uniformity-Enhanced Reflector in Rapid Thermal Process
Date Issued
2004-05-31
Date
2004-05-31
Author(s)
DOI
922622E002023CC3
Abstract
Traditional furnace has long processing time, because of slow rate in rising or lowering
temperature. RTP（Rapid thermal Process） can shorten much processing time, due to fast
temperature-rising or temperature-lowering rate. The reflector in RTP has a lot of influence on
temperature uniformity. Reflector is expendable and has some lifetime. We ourselves have
simulated and experimented. We can make reflector which quality is as good as made by Jet.
Subjects
RTP（Rapid thermal Process）
reflector
uniformity
Publisher
臺北市：國立臺灣大學電子工程學研究所
Type
report
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922622E002023CC3.pdf
Size
676.53 KB
Format
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Checksum
(MD5):50c9c7bff042f8349e61dbdbe73eba13