Deposition of osmium thin films using pyrazolate complexes as CVD source reagents

Resource

Journal of Materials Chemistry 12: 1363-1369

Journal

Journal of Materials Chemistry 12:

Pages

1363-1369

Date Issued

2002

Date

2002

Author(s)

Chi, Yun

Yu, Huan-Li

Ching, Wei-Li

Liu, Chao-Shiuan

Chen, Yao-Lun

Chou, Tsung-Yi

Peng, Shie-Ming

Lee, Gene-Hsiang

URI

Type

journal article

File(s)

Name

297.pdf

Size

425.71 KB

Format

Adobe PDF

Checksum

(MD5):f6b600953718b6ed1b4b7cb35a473d57