Fluorinated aminoalkoxide CuII complexes: new CVD precursors for deposition of copper metal

Resource

Journal of Materials Chemistry 12: 3541-3550

Journal

Journal of Materials Chemistry 12:

Pages

3541-3550

Date Issued

2002

Date

2002

Author(s)

Chi, Yun

Hsu, Peng-Fu

Liu, Chao-Shiuan

Ching, Wei-Li

Chou, Tsung-Yi

Carty, Arthur J.

Peng, Shie-Ming

Lee, Gene-Hsiang

Chuang, Shiow-Huey

URI

Type

journal article

File(s)

Name

299.pdf

Size

430.34 KB

Format

Adobe PDF

Checksum

(MD5):30ad3e29bd9f269944b3a9cc267a6b39