https://scholars.lib.ntu.edu.tw/handle/123456789/288948| Title: | Thin-oxide thickness measurement in ellipsometry by a wafer rotation method | Authors: | JENN-GWO HWU | Issue Date: | 1990 | Journal Volume: | 33 | Journal Issue: | 10 | Start page/Pages: | 1327-1328 | Source: | Solid State Electronics | URI: | http://www.scopus.com/inward/record.url?eid=2-s2.0-0025502702&partnerID=MN8TOARS http://scholars.lib.ntu.edu.tw/handle/123456789/288948 |
DOI: | 10.1016/0038-1101(90)90037-F |
| Appears in Collections: | 電機工程學系 |
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