Surface-micromachined 2D optical scanners with high-performance single-crystalline silicon micromirrors

Journal

Pacific Rim Conference on Lasers and Electro-Optics, CLEO

Pages

699-700

Date Issued

2000

Author(s)

Su, Guo-Dung J.

Nguyen, Hung

Paterson, Pam

Toshiyoshi, Hiroshi

Wu, Ming C.

URI

Type

conference paper