https://scholars.lib.ntu.edu.tw/handle/123456789/289972
Title: | Translating fab cycle time and output targets into production control requirements for tool groups | Authors: | Hu, M.-D. Chang, S.-C. SHI-CHUNG CHANG |
Issue Date: | 2000 | Start page/Pages: | 73-83 | Source: | 2000 Semiconductor Manufacturing Technology Workshop | URI: | http://www.scopus.com/inward/record.url?eid=2-s2.0-84963753730&partnerID=MN8TOARS http://scholars.lib.ntu.edu.tw/handle/123456789/289972 |
DOI: | 10.1109/SMTW.2000.883087 |
Appears in Collections: | 電機工程學系 |
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00883087.pdf | 700.92 kB | Adobe PDF | View/Open |
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