https://scholars.lib.ntu.edu.tw/handle/123456789/289973| Title: | SHEWMAC: An end-of-line SPC scheme via exponentially weighted moving statistics | Authors: | Fan, C.-M. Chang, S.-C. Guo, R.-S. Kung, H.-H. You, J.-C. Chen, H.-P. Lin, S. Wei, C.-S. SHI-CHUNG CHANG Guo, Ruey-Shan |
Issue Date: | 2000 | Start page/Pages: | 268-278 | Source: | 2000 Semiconductor Manufacturing Technology Workshop | URI: | http://www.scopus.com/inward/record.url?eid=2-s2.0-84963741447&partnerID=MN8TOARS http://scholars.lib.ntu.edu.tw/handle/123456789/289973 |
DOI: | 10.1109/SMTW.2000.883105 |
| Appears in Collections: | 電機工程學系 |
| File | Description | Size | Format | |
|---|---|---|---|---|
| 00883105.pdf | 654.43 kB | Adobe PDF | View/Open |
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