https://scholars.lib.ntu.edu.tw/handle/123456789/292418| Title: | Application of anodization to reoxidize silicon nitride film | Authors: | Lin, Y.-P. Hwu, J.-G. JENN-GWO HWU |
Issue Date: | 2001 | Journal Volume: | 40 | Journal Issue: | 12 | Start page/Pages: | 6788-6791 | Source: | Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers | URI: | http://www.scopus.com/inward/record.url?eid=2-s2.0-0035713879&partnerID=MN8TOARS http://scholars.lib.ntu.edu.tw/handle/123456789/292418 |
| Appears in Collections: | 電機工程學系 |
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