Laser-induced activation of p-type GaN with the second harmonics of a Nd:YAG laser
Journal
Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers
Journal Volume
40
Journal Issue
4 A
Pages
2143-2145
Date Issued
2001
Author(s)
Cheng, Y.-C.
Liao, C.-C.
Feng, S.-W.
Lin, Y.-S.
Kung-Jeng, M.
Chou, C.-C.
Lee, C.-M.
Chyi, J.-I.
Abstract
Magnesium-doped p-type GaN has been activated by irradiation with photons of 532 nm wavelength from the second harmonic of a Q-switched neodymium-doped ytterbium aluminum garnet (Nd:YAG) laser. With appropriate laser fluence levels and irradiation pulse numbers, such a laser-induced activation process resulted in a hole concentration about the same as that obtained through the conventional thermal activation technique. Temperature measurement revealed that the laser-induced process is very unlikely to be thermal. It was speculated that the process might involve the photon-induced breaking of the H-Mg bonds.
Subjects
Laser-induced activation; Mg-doped GaN; P-type activation; Thermal activation
Other Subjects
Activation analysis; Laser beam effects; Magnesium printing plates; Photons; Q switched lasers; Second harmonic generation; Semiconductor doping; Temperature measurement; Thermal activation; Gallium nitride
Type
journal article