https://scholars.lib.ntu.edu.tw/handle/123456789/292603
標題: | Laser-induced activation of p-type GaN with the second harmonics of a Nd:YAG laser | 作者: | Cheng, Y.-C. Liao, C.-C. Feng, S.-W. CHIH-CHUNG YANG Lin, Y.-S. Kung-Jeng, M. Chou, C.-C. Lee, C.-M. Chyi, J.-I. |
關鍵字: | Laser-induced activation; Mg-doped GaN; P-type activation; Thermal activation | 公開日期: | 2001 | 卷: | 40 | 期: | 4 A | 起(迄)頁: | 2143-2145 | 來源出版物: | Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers | 摘要: | Magnesium-doped p-type GaN has been activated by irradiation with photons of 532 nm wavelength from the second harmonic of a Q-switched neodymium-doped ytterbium aluminum garnet (Nd:YAG) laser. With appropriate laser fluence levels and irradiation pulse numbers, such a laser-induced activation process resulted in a hole concentration about the same as that obtained through the conventional thermal activation technique. Temperature measurement revealed that the laser-induced process is very unlikely to be thermal. It was speculated that the process might involve the photon-induced breaking of the H-Mg bonds. |
URI: | http://www.scopus.com/inward/record.url?eid=2-s2.0-0035301742&partnerID=MN8TOARS http://scholars.lib.ntu.edu.tw/handle/123456789/292603 https://www.scopus.com/inward/record.uri?eid=2-s2.0-0035301742&doi=10.1143%2fjjap.40.2143&partnerID=40&md5=39572fa483ed41a3b109d02996b450da |
ISSN: | 00214922 | SDG/關鍵字: | Activation analysis; Laser beam effects; Magnesium printing plates; Photons; Q switched lasers; Second harmonic generation; Semiconductor doping; Temperature measurement; Thermal activation; Gallium nitride |
顯示於: | 電機工程學系 |
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